00509nam a2200169Ia 4500008004100000020001800041040002500059082001300084100001700097245004500114250001600159260002500175300001000200942000700210952010500217999001700322240301s9999    xx            000 0 und d  a9781680948455  aNORSU-BaycNORSU-Bay  a621 A77   a3G Learning  0aMicro Electro Mechanical Systems (MEMS)   a2nd Edition  b3G E-Learning c2018  a329p.  cBK  00104070aNORSU-BaybNORSU-BaycCIRCd2024-02-29l0o621 A77 pBay8167r2024-02-29w2024-02-29yBK  c25535d25535