00451nam a2200145Ia 4500003000600000005001700006008004100023020001800064040004900082082002100131100001700152245005000169260003500219500005100254NORSU20240729034518.0240220s9999    xx            000 0 und d  a9780470466346  aNORSU Dumaguete (Main Campus ll)cNORSU-MCII  a621.381 P93 2011  aLee, Ki Bang 0aPrinciples of Micro-electromechanical systems  bJohn Wiley & sons, Inc.cc2011  aIncludes bibliographical references and index.