Lee, Ki Bang <br/><br/>
Principles of Micro-electromechanical systems 

 -  John Wiley & sons, Inc.  c2011 
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780470466346 
<br/><br/><label>Dewey Class. No.: </label>621.381 P93 2011